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Zr(IV) and Hf(IV) β-diketonate complexes as precursors for the photochemical deposition of ZrO2 and HfO2 thin films

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Autor dc.contributor.author Cabello G.
Autor dc.contributor.author Lillo L.
Autor dc.contributor.author Buono-Core G.E.
Fecha Ingreso dc.date.accessioned 2014-04-05T00:13:03Z
Fecha Disponible dc.date.available 2014-04-05T00:13:03Z
Fecha en Repositorio dc.date.issued 2014-04-04
dc.identifier 10.1016/j.jnoncrysol.2007.08.014
dc.description.abstract In this paper amorphous ZrO2 and HfO2 thin films were obtained by direct UV irradiation of Zr(IV) and Hf(IV) β-diketonate precursor complexes on Si(1 0 0) and fused silica substrates. The precursors, Zr(CH3COCHCOCH3)4 and Hf(C6H5COCHCOCH3)4 were deposited as amorphous thin films by spin coating. The photochemistry of these films was monitored by FT-IR spectroscopy. The photolysis with 254 nm light led to the loss of the ligands from the coordination complexes, and the production of metallic oxides. The thin films products were characterized by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). These analyses revealed that as-deposited films are amorphous and that the presence of carbon is thought to arise from the ligands. However, post-annealing of the photodeposited films favors the stoichiometric and optical properties of ZrO2 and HfO2 thin films. © 2007 Elsevier B.V. All rights reserved. en_US
dc.source Journal of Non-Crystalline Solids
Link Descarga dc.source.uri http://www.scopus.com/inward/record.url?eid=2-s2.0-37349087526&partnerID=40&md5=540fc34c2c92239d510de5a110807adc
Title dc.title Zr(IV) and Hf(IV) β-diketonate complexes as precursors for the photochemical deposition of ZrO2 and HfO2 thin films en_US
Tipo dc.type Article
dc.description.keywords Amorphous semiconductors; Atomic force microscopy; Chemical vapor deposition; Electrochemical properties; Scanning tunneling microscopy; Sensors; X ray diffraction; X ray photoelectron spectroscopy; Zirconia; Amorphous thin films; Photochemical depositions; Scattering measurements; Thin films en_US


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